Sprecher
Beschreibung
The studies on creation of surface nanostructures on metals, semiconductors and insulators are important for development of new technologies for production of microelectronic devices [1]. Structures of nanometric sizes can be created, for example, in collisions of highly charged ions (HCI) with surfaces of various materials. In this case different parameters of the ion beams, irradiated materials and processing conditions lead to miscellaneous characteristic modifications obtained on a material surface (see [2] and reference therein). In order to fully understand this process systematic measurements of surface modifications using HCI ions under various experimental conditions and with different ions/materials are needed.
In this work surface modifications caused by irradiation of 100 nm gold nanolayers using highly charged Xe
References:
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